Details
Handbook of Silicon Semiconductor Metrology
71,24 € |
|
Verlag: | Crc Press |
Format: | |
Veröffentl.: | 29.06.2001 |
ISBN/EAN: | 9780203904541 |
Sprache: | englisch |
Anzahl Seiten: | 896 |
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Beschreibungen
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay